Optimization of the thermal field of 8-inch SiC crystal growth by PVT method with
“3 separation heater method”
Oral presentation-03
Presented by: Binjie Xu
Binjie Xu
State Key Laboratory of Silicon Materials and School of Materials
Science and Engineering, Zhejiang University, Hangzhou 310027, China
Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices,
ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou 311215, China