IMF2017

In contrast to the ferroelectric polymers, inorganic ferroelectric oxide films are strong for thermal shocks and have extremely large piezoelectric as well as pyroelectric coefficients. However, that they have been limitedly used in flexible energy due to their rigidity. In this talk, we will report the development of an inorganic PZT, BFO film based mechanical energy harvesting devices. By adopting a newly developed flexible Ni−Cr metal foil substrate and a perovskite-structure-compatible LaNiO₃ (LNO) bottom electrode, we successfully grow a flexible PZT, BFO films with a high remanent electric polarization, high piezoelectric coefficient, and high pyroelectric coefficient. The ferroelectric inorganic film-based devices have been proven to stably generate electric power even in harsh environments including high humidity, strong base environment, and elevated temperatures.