IMF2017

We investigated effect of oxygen flow rate on structural, optical, and electrical properties of SnO₂/Ag/SnO₂ multilayer thin films that were deposited by sequential using RF/DC magnetron sputtering at room temperature on PET substrate. As the oxygen flow rate increases from 0 to 0.5 sccm, the transmittances of SnO₂ (35 nm)/Ag (13 nm)/SnO₂ (35 nm) varied from 81.2 to 87.1 % at 550 nm wavelength and the sheet resistance remained around 7 Ω/□. The highest value of figure of merit φTC was 35.3 10-3Ω-1 for the film with oxygen flow rate of 0.4 sccm, while the transmittance was 87.1 % at 550 nm wavelength and the sheet resistance was 7.14 Ω/□.