Fabrication of face-to-face annealed sputter-deposited AlN templates with screw-dislocation densities of 10 3 -10 4 cm -2

09:45 - 11:00

Parallel sessions

09:45 - 11:00

Chair/s:

Fabio Miletto-Granozio

Fabrication of face-to-face annealed sputter-deposited AlN templates with screw-dislocation densities of 10³-10⁴ cm^-2

Oral presentation-02

Presented by: Hideto Miyake

Hideto Miyake

Mie University

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