16:30 - 18:30
Room: Poster Area
Influence of chemical composition of side inlet jet on deposition rate near wafer edge in APCVD process
Poster presentation-41
Presented by: Chieh Hu
Chieh Hu
1. Department of Mechanical Engineering, National Central University, Taoyuan City, Taiwan 2. Research and Development Division, Global Wafer Co., Ltd, Hsinchu City, Taiwan