14:45 - 16:00
Room: SG-II-2
Chair/s:
Jochen Friedrich, Stefano Rampino
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Si-Epitaxy with mixtures of trichlorosilane and silicon tetrachloride precursors at different temperatures
Oral presentation-04
Presented by: Marion Drießen
Marion Drießen
Fraunhofer-Institut for Solar Energy Systems ISE
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