Research on the Crystal Phase and Microstructure of Pure Phase ε -Ga 2 O 3 Film by Plasma Enhanced Atomic Layer Deposition

09:45 - 11:00

Chair/s:

Fabio Miletto-Granozio

Research on the Crystal Phase and Microstructure of Pure Phase ε-Ga₂O₃ Film by Plasma Enhanced Atomic Layer Deposition

Oral presentation-03

Presented by: Yang Li

Yang Li

Shandong University

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