Numerical studies on the dislocation density in the n-type 4H-SiC
Poster presentation-60
Presented by: Xuefeng Han
Xuefeng Han et al.
State Key Laboratory of Silicon Materials & School of Materials Science and Engineering, Zhejiang University, China
Institute of Advanced Semiconductors & Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, China
Ultra-precision Machining Research Center, Zhejiang University of Technology, China